Title :
Interlayer MEMS RF switch for 3D MMICS
Author :
Wang, Y.A. ; Qinghua Kang ; Bosui Liu ; Ferendeci, A.M. ; Mah, M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA
Abstract :
A novel interlayer micromachined capacitive microwave switch sandwiched between two polyimide layers and two ground planes was designed and fabricated. The switch structure and the coplanar waveguide in the switch region were optimized for low insertion loss in the "on" state and high return loss and high isolation in the "off" state while satisfying other restraint conditions. Four serpentine beams were connected to the switch capacitance plate to reduce the actuation voltage.
Keywords :
MMIC; coplanar waveguide components; losses; microactuators; microwave switches; 3D MMICS; actuation voltage; capacitive microwave switch; coplanar waveguide; ground planes; insertion loss; interlayer MEMS RF switch; isolation; polyimide layers; restraint conditions; return loss; serpentine beams; switch capacitance plate; Coplanar waveguides; Gold; Impedance; MMICs; Micromechanical devices; Polyimides; Radio frequency; Silicon; Strips; Switches;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.863585
