• DocumentCode
    3543854
  • Title

    A novel degradation mechanism of AlGaN/GaN/Silicon heterostructures related to the generation of interface traps

  • Author

    Meneghini, Matteo ; Bertin, Marco ; dal Santo, G. ; Stocco, Andrea ; Chini, Alessandro ; Marcon, Denis ; Malinowski, Pawel E. ; Mura, Gianluca ; Musu, E. ; Vanzi, M. ; Meneghesso, Gaudenzio ; Zanoni, Enrico

  • Author_Institution
    Dept. of Inf. Eng., Univ. of Padova, Padua, Italy
  • fYear
    2012
  • fDate
    10-13 Dec. 2012
  • Abstract
    With this paper we report on an extensive analysis of the degradation of AlGaN/GaN Schottky diodes, submitted to reverse-bias stress tests. The analysis is based on combined electrical measurements and 2D simulation. Results indicate that stress may induce a gradual increase in the leakage current of the devices. Capacitance-Voltage investigation was used as a tool for the analysis of the modifications in device structure generated during the stress tests. We demonstrate a new failure mechanism which consist in the formation of donor-like traps on the GaN-side of the AlGaN/GaN interface, and can explain the observed increase in diode leakage. 2D simulation was used to support the hypothesis on degradation, and to extrapolate the parameters of the trap responsible for the degradation process.
  • Keywords
    III-V semiconductors; Schottky diodes; aluminium compounds; elemental semiconductors; failure analysis; gallium compounds; interface states; semiconductor device reliability; silicon; stress analysis; wide band gap semiconductors; 2D simulation; AlGaN-GaN; Schottky diodes; Si; capacitance-voltage investigation; combined electrical measurements; device structure analysis; diode leakage; donor-like traps; failure mechanism; heterostructure degradation mechanism; interface trap generation; reverse-bias stress tests; Aluminum gallium nitride; Degradation; Gallium nitride; HEMTs; Leakage current; MODFETs; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2012 IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0163-1918
  • Print_ISBN
    978-1-4673-4872-0
  • Electronic_ISBN
    0163-1918
  • Type

    conf

  • DOI
    10.1109/IEDM.2012.6479035
  • Filename
    6479035