DocumentCode
3543854
Title
A novel degradation mechanism of AlGaN/GaN/Silicon heterostructures related to the generation of interface traps
Author
Meneghini, Matteo ; Bertin, Marco ; dal Santo, G. ; Stocco, Andrea ; Chini, Alessandro ; Marcon, Denis ; Malinowski, Pawel E. ; Mura, Gianluca ; Musu, E. ; Vanzi, M. ; Meneghesso, Gaudenzio ; Zanoni, Enrico
Author_Institution
Dept. of Inf. Eng., Univ. of Padova, Padua, Italy
fYear
2012
fDate
10-13 Dec. 2012
Abstract
With this paper we report on an extensive analysis of the degradation of AlGaN/GaN Schottky diodes, submitted to reverse-bias stress tests. The analysis is based on combined electrical measurements and 2D simulation. Results indicate that stress may induce a gradual increase in the leakage current of the devices. Capacitance-Voltage investigation was used as a tool for the analysis of the modifications in device structure generated during the stress tests. We demonstrate a new failure mechanism which consist in the formation of donor-like traps on the GaN-side of the AlGaN/GaN interface, and can explain the observed increase in diode leakage. 2D simulation was used to support the hypothesis on degradation, and to extrapolate the parameters of the trap responsible for the degradation process.
Keywords
III-V semiconductors; Schottky diodes; aluminium compounds; elemental semiconductors; failure analysis; gallium compounds; interface states; semiconductor device reliability; silicon; stress analysis; wide band gap semiconductors; 2D simulation; AlGaN-GaN; Schottky diodes; Si; capacitance-voltage investigation; combined electrical measurements; device structure analysis; diode leakage; donor-like traps; failure mechanism; heterostructure degradation mechanism; interface trap generation; reverse-bias stress tests; Aluminum gallium nitride; Degradation; Gallium nitride; HEMTs; Leakage current; MODFETs; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2012 IEEE International
Conference_Location
San Francisco, CA
ISSN
0163-1918
Print_ISBN
978-1-4673-4872-0
Electronic_ISBN
0163-1918
Type
conf
DOI
10.1109/IEDM.2012.6479035
Filename
6479035
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