Title :
How lasers and optics help increase semiconductor manufacturing yield
Author :
Stokowski, S. ; Vaez-Iravani, M.
Author_Institution :
KLA-Tencor, Milpitas, CA, USA
Abstract :
Summary form only given. We discuss the requirements of, and solutions for, the inspection problems for the ULSI technology. Preferred embodiments for specific detection problems are described, and the possible limitations, and extensions, of the relevant technologies are discussed.
Keywords :
ULSI; inspection; integrated circuit testing; measurement by laser beam; IC testing technologies; ULSI technology; detection problems; inspection problems; lasers; optics; semiconductor manufacturing yield; High speed optical techniques; Inspection; Optical films; Optical filters; Optical scattering; Optical sensors; Semiconductor device manufacture; Semiconductor lasers; Throughput; Very large scale integration;
Conference_Titel :
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-339-0
DOI :
10.1109/CLEO.1998.676280
