DocumentCode
3544775
Title
Buried oxide vertical-cavity surface-emitting laser arrays with transparent top electrodes
Author
Chua, C.L. ; Thornton, R.L. ; Treat, D.W.
Author_Institution
Xerox Palo Alto Res. Center, CA, USA
fYear
1998
fDate
3-8 May 1998
Firstpage
370
Lastpage
371
Abstract
Summary form only given. We present properties of densely packed all-epitaxial oxide-apertured VCSEL arrays. The devices utilize transparent contacts to increase the available packing density and are fabricated in a planar manner through the use of via holes. Initial results on thermal isolation between devices are encouraging and indicate that arrays with high packing densities based on the proposed architecture are achievable with acceptable cross talk.
Keywords
laser cavity resonators; optical crosstalk; oxidation; semiconductor device packaging; surface emitting lasers; transparency; acceptable cross talk; buried oxide vertical-cavity surface-emitting laser arrays; densely packed all-epitaxial oxide-apertured VCSEL arrays; high packing densities; packing density; planar manner; thermal isolation; transparent contacts; transparent top electrodes; via holes; Electrodes; Fiber lasers; Optical arrays; Optical beams; Oxidation; Stimulated emission; Surface emitting lasers; Surface treatment; Threshold current; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
1-55752-339-0
Type
conf
DOI
10.1109/CLEO.1998.676322
Filename
676322
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