Title :
A new MEMS accelerometer applied in civil engineering and its calibration test
Author :
Zhao, Ming ; Xiong, Xiaolei
Author_Institution :
Dept. of Civil Eng., Tongji Univ., Shanghai, China
Abstract :
The micro-electro-mechanical systems (MEMS) technology has broadened the horizon for sensors design, and MEMS devices, such as sensors and actuators, with low manufacturing cost, compact size, low weight and power consumption, are widely used in many industrial fields. A new type of MEMS accelerometer designed for the application in civil engineering is introduced in this paper. The some characteristics parameters of the sensor, such as reliable response frequency range and cross-axis sensitivity ratio, are tested through the calibration experiments designed in the paper, with the consideration based on application fields of the accelerometer.
Keywords :
accelerometers; calibration; civil engineering; microsensors; reliability; MEMS accelerometer design; calibration test experiments; civil engineering; cross-axis sensitivity ratio; industrial field application; manufacturing cost; microelectro-mechanical system; power consumption; reliable response frequency range; sensor design; Accelerometers; Actuators; Calibration; Civil engineering; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Sensor phenomena and characterization; Sensor systems; Testing; MEMS; accelerometer; cross-axis sensitivity ratio; low-frequency response; test;
Conference_Titel :
Electronic Measurement & Instruments, 2009. ICEMI '09. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-3863-1
Electronic_ISBN :
978-1-4244-3864-8
DOI :
10.1109/ICEMI.2009.5274629
