A new MEMS accelerometer applied in civil engineering and its calibration test

The micro-electro-mechanical systems (MEMS) technology has broadened the horizon for sensors design, and MEMS devices, such as sensors and actuators, with low manufacturing cost, compact size, low weight and power consumption, are widely used in many industrial fields. A new type of MEMS accelerometer designed for the application in civil engineering is introduced in this paper. The some characteristics parameters of the sensor, such as reliable response frequency range and cross-axis sensitivity ratio, are tested through the calibration experiments designed in the paper, with the consideration based on application fields of the accelerometer.