DocumentCode
3545658
Title
Microactuation of suspended MEMS beams
Author
Gattiker, Giorgio ; Kaler, Karan V.I.S. ; Mintchev, Martin P.
Author_Institution
Electr. & Comput. Eng. Dept., Calgary Univ., Alta., Canada
fYear
2005
fDate
23-26 May 2005
Firstpage
2755
Abstract
This study presents the design, implementation, and testing of microelectromechanical system (MEMS)-based actuators. The concepts of electrostatic and thermal microactuation are discussed. Geometrically identical fixed-fixed microbeams were fabricated to compare quantitatively the two different actuation principles. The beams are implemented with Micralyne generalized MEMS (MicraGEM) technology, a silicon-on-insulator (SOI)-based microfabrication process.
Keywords
electrostatic actuators; microactuators; micromachining; silicon-on-insulator; MEMS-based actuators; SOI; electrostatic microactuation; fixed-fixed microbeams; silicon-on-insulator based microfabrication process; suspended MEMS beams; thermal microactuation; Capacitors; Design engineering; Electrodes; Electrostatic actuators; Microactuators; Microelectromechanical systems; Micromechanical devices; Silicon on insulator technology; System testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2005. ISCAS 2005. IEEE International Symposium on
Print_ISBN
0-7803-8834-8
Type
conf
DOI
10.1109/ISCAS.2005.1465197
Filename
1465197
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