DocumentCode :
3545678
Title :
Plasma self-bias and ion acceleration in the madhex helicon source
Author :
Yung-Ta Sung ; Scharer, John E. ; DeVinney, Michael
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA
fYear :
2013
fDate :
16-21 June 2013
Firstpage :
1
Lastpage :
1
Abstract :
Summary form only given. Helicon and magnetized radio-frequency (RF) plasmas have been studied for some time. It is often claimed that the ion acceleration observed in these sources is due to double layers. Recently strong (160 V) time averaged self-bias has been observed in MadHeX1, resulting in a large potential difference between the plasma source and expansion regions2, has piqued our interest to further examine and fully realize the ion acceleration process. The modified MadHeX experimental facility consists of a 120 cm long, 10 cm inner diameter Pyrex tube attached to a stainless steel expansion chamber, which is 60 cm long and 45 cm in diameter (expansion ratio RE = 4.5) with an axial magnetic field, variable up to 1.2 kG at the source region that can be operated in flat or nozzle field configurations. An 18 cm long, 12 cm diameter half-turn double-helix antenna is used to excite helicon waves in the source. A new double magnetic mirror and an additional magnetic coil placed between the transition region between plasma source and expansion chamber are used to increase plasma ionization rate and reduce ion-electron recombination and neutral reflux in the expansion region. The effect of RF power, magnetic field strength and gas flow rate on the plasma parameters including electron temperature, density, plasma potential and ion beam acceleration are explored by probe diagnostics (Langmuir probe, emissive probe and retarding potential analyzer) and non-invasive optical techniques (laser induced fluorescence and optical emission spectroscopy). The role of substantial RF fluctuations in the plasma potential and the upstream end-plate boundary condition are addressed. The effect of the electron energy distribution that may include substantial tails on plasma self-bias and the ion beam formation and acceleration is examined by optical emission spectroscopy and cross-checked with the results via using a retarding potential analyzer. A- so, its effect on the ion energy distribution is verified by using argon 668 nm laser induced fluorescence.
Keywords :
Langmuir probes; antennas in plasma; argon; electron density; helicons; high-frequency discharges; ion beams; ion recombination; ionisation; magnetic mirrors; nozzles; plasma accelerators; plasma density; plasma dielectric properties; plasma magnetohydrodynamics; plasma sources; plasma temperature; stainless steel; Ar; Langmuir probe; MadHeX helicon source; Pyrex tube; RF power; axial magnetic field; double layers; double magnetic mirror; electron density; electron energy distribution; electron temperature; emissive probe; expansion ratio; expansion region; gas flow rate; half-turn double-helix antenna; helicon wave; ion acceleration process; ion beam acceleration; ion beam formation; ion energy distribution; ion-electron recombination; large potential difference; laser induced fluorescence; magnetic coil; magnetic field strength; magnetized radiofrequency plasmas; modified MadHeX; neutral reflux; noninvasive optical techniques; nozzle field configuration; optical emission spectroscopy; plasma ionization rate; plasma parameters; plasma potential; plasma self-bias; plasma source; probe diagnostics; retarding potential analyzer; size 10 cm; size 12 cm; size 120 cm; size 18 cm; size 45 cm; size 60 cm; source region; stainless steel expansion chamber; strong time averaged self-bias; substantial RF fluctuation; transition region; upstream end-plate boundary condition; voltage 160 V; wavelength 668 nm; Acceleration; Electric potential; Electron optics; Ion beams; Plasmas; Radio frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science (ICOPS), 2013 Abstracts IEEE International Conference on
Conference_Location :
San Francisco, CA
ISSN :
0730-9244
Type :
conf
DOI :
10.1109/PLASMA.2013.6633362
Filename :
6633362
Link To Document :
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