DocumentCode
3546150
Title
[Copyright notice]
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
1
Lastpage
1
Abstract
The following topics are dealt with: optical MEMS; RF MEMS; power MEMS; microactuators; bio microsystem; medical microsystem; chemical microsensors; microfluidic components; gyroscopes; nanomaterials; fabrication technology; and biosensors.
Keywords
biosensors; chemical sensors; gyroscopes; micro-optomechanical devices; microactuators; microfluidics; microsensors; nanostructured materials; RF MEMS; bio microsystem; biosensors; chemical microsensors; fabrication technology; gyroscopes; medical microsystem; microactuators; microfluidic components; nanomaterials; optical MEMS; power MEMS;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170077
Filename
6170077
Link To Document