Title :
Out-of-plane vertical torsion mirror for optical scanner and chopper applications
Author :
Su, G.D. ; Lee, S.S. ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Summary form only given. A novel surface-micromachined, out-of-plane vertical torsion mirror has been successfully demonstrated. An optical scan range of 40 and a resonant frequency of 0.5 kHz have been achieved. Its applications include optical scanners, switches, and on-chip optical choppers for monolithic micro-optical instruments.
Keywords :
integrated optoelectronics; micro-optics; micromachining; mirrors; optical elements; optical scanners; optical switches; monolithic micro-optical instruments; on-chip optical choppers; optical chopper applications; optical scan range; optical scanner; optical scanners; optical switches; out-of-plane vertical torsion mirror; resonant frequency; surface-micromachined; Actuators; Choppers; Electrodes; Integrated optics; Mirrors; Optical devices; Optical surface waves; Optical wavelength conversion; Voltage; Wavelength conversion;
Conference_Titel :
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-339-0
DOI :
10.1109/CLEO.1998.676521
