DocumentCode
3546300
Title
Out-of-plane vertical torsion mirror for optical scanner and chopper applications
Author
Su, G.D. ; Lee, S.S. ; Wu, Ming C.
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fYear
1998
fDate
3-8 May 1998
Firstpage
479
Lastpage
480
Abstract
Summary form only given. A novel surface-micromachined, out-of-plane vertical torsion mirror has been successfully demonstrated. An optical scan range of 40 and a resonant frequency of 0.5 kHz have been achieved. Its applications include optical scanners, switches, and on-chip optical choppers for monolithic micro-optical instruments.
Keywords
integrated optoelectronics; micro-optics; micromachining; mirrors; optical elements; optical scanners; optical switches; monolithic micro-optical instruments; on-chip optical choppers; optical chopper applications; optical scan range; optical scanner; optical scanners; optical switches; out-of-plane vertical torsion mirror; resonant frequency; surface-micromachined; Actuators; Choppers; Electrodes; Integrated optics; Mirrors; Optical devices; Optical surface waves; Optical wavelength conversion; Voltage; Wavelength conversion;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
1-55752-339-0
Type
conf
DOI
10.1109/CLEO.1998.676521
Filename
676521
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