Stochastic gravity sensor with robust output using white-noise-applied Bi-stable state for low S/N environments

We demonstrated a new stochastic gravity sensor, which just counts the number, m, of pull-in to either of counter electrodes in n-times trials to know pull-in probability, m/n, under white-noise-applied bistable state. This new sensing principle is robust against noise and parasitics, which severely limit sensor performance in such a low S/N condition that the sensor in a high temperature environment is connected with a readout circuit using a long wire. Pull-in to the counter electrode resulted in large capacitance change, and clear sensing signal is obtained even in the low S/N condition. The gravity sensor was fabricated on a silicon/glass substrate, and the sensing principle was experimentally confirmed.