Title :
High-Q, 3kHz Single-Crystal-Silicon Cylindrical Rate-Integrating Gyro (CING)
Author :
Cho, J. ; Gregory, J.A. ; Najafi, K.
Author_Institution :
Center for Wireless Integrated Microsyst. (WIMS), Univ. of Michigan, Ann Arbor, MI, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper describes the design, control system and test results of the Single-Crystal-Si (SCS) Cylindrical Rate-Integrating Gyroscope (CING), operating at 3kHz. The CING is a MEMS gyroscope to demonstrate continuous rate-integrating operation, operating over several hours at a time. The sensor is fabricated with the Silicon-On-Glass (SOG) process, calibrated for deep (>;300μm), high aspect-ratio (>;1:15), and narrow-gap (2μm) Si structures. The sensor has an original Δf of 7Hz, and a nominal damping time (τ0) of 8.7 seconds when modes are matched within 20mHz. It was evaluated in rate- and rate-integrating modes using a hybrid FPGA and software control. The rate-mode angle random walk was 0.09°/√Hr with Allan Variance of 129°/hr and an angular gain of 0.011.
Keywords :
field programmable gate arrays; gyroscopes; micromechanical devices; FPGA; MEMS gyroscope; SOG process; control system; design; frequency 3 kHz; silicon-on-glass process; single-crystal-silicon cylindrical rate-integrating gyro CING; Anisotropic magnetoresistance; Damping; Electrodes; Gyroscopes; Micromechanical devices; Resonant frequency; Software;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170121
