Title :
Simulation of the nonlinearity in clumped-clumped beam MEMS resonator
Author :
JunWen Jiang ; Jingfu Bao ; Yijia Du
Author_Institution :
Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
It is important to study the nonlinearity of MEMS resonators since it affects the performance of the resonators as well as filters and oscillators constructed by them. Based on the equivalent circuit model, the nonlinearity, especially the A-f effect of a Clumped-clumped (C-C) beam MEMS resonator is studied in this research. The established model and simulation procedure enables us to reveal the resonance frequency and amplitude of the electrostatic MEMS resonator under relatively small displacement of the beam. The circuit model is built with mechanical solution and F-V analogy. What´s more, an iterative program is used in this study to depict the A-f effect. The results reveals the change of the output current with frequency response curves by varying the DC bias voltage, the ac excitation voltage and the gap size.
Keywords :
MMIC oscillators; electrostatic devices; equivalent circuits; frequency response; micromechanical resonators; microwave filters; microwave resonators; A-f effect; AC excitation voltage variation; DC bias voltage variation; F-V analogy; amplitude; clumped-clumped beam MEMS resonator; electrostatic MEMS resonator; equivalent circuit model; filters; frequency response curves; gap size variation; iterative program; nonlinearity simulation; oscillators; resonance frequency; Equivalent circuits; Frequency response; Integrated circuit modeling; Mathematical model; Micromechanical devices; Q-factor; Resonant frequency;
Conference_Titel :
Communications, Circuits and Systems (ICCCAS), 2013 International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4799-3050-0
DOI :
10.1109/ICCCAS.2013.6765252
