DocumentCode
3546534
Title
One-step fabrication of optically transparent polydimethylsiloxane artificial lotus leaf film using under-exposed under-baked photoresist mold
Author
Youngsam Yoon ; Dong-Weon Lee ; Jun-Hyung Ahn ; Joon Sohn ; Jeong-Bong Lee
Author_Institution
Dept. of Electr. Eng., Univ. of Texas at Dallas, Richardson, TX, USA
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
301
Lastpage
304
Abstract
We report an extremely simple one-step fabrication method of flexible, optically transparent super-hydrophobic polydimethylsiloxane (PDMS) thin film using under-exposed under-baked photoresist (PR) mold. Significant under soft bake condition makes photoresist retains good amount of solvents which greatly increase the dissolution rate. Once this condition is combined with the under-exposure condition, it would create a mushroom-like structure on the PR mold. The replicated PDMS using this PR mold showed hierarchical micro/nano scale features on the high aspect ratio pillar array structure. Contact angles and optical transmittance of various surfaces were tested and results were compared. A static contact angle as high as 163° was achieved. These micro/nano patterned super-hydrophobic transparent PDMS films could be used in various water-repellent applications.
Keywords
contact angle; dissolving; hydrophobicity; light transmission; moulding; nanopatterning; photoresists; polymer films; transparency; PDMS thin film; PR mold; aspect ratio pillar array structure; contact angles; dissolution rate; micropatterned super-hydrophobic transparent PDMS films; mushroom-like structure; nano patterned super-hydrophobic transparent PDMS films; one-step fabrication; optical transmittance; optically transparent polydimethylsiloxane artificial lotus leaf film; optically transparent super-hydrophobic polydimethylsiloxane thin films; soft bake condition; static contact angle; under-exposed under-baked photoresist mold; under-exposure condition; water-repellent applications; Optical device fabrication; Optical films; Optical imaging; Optical polymers; Resists; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170154
Filename
6170154
Link To Document