DocumentCode
3546567
Title
Bistable criterion for mechanically bistable mechanism
Author
Wu, Cho-Chun ; Lin, Meng-Ju ; Chen, Rongshun
Author_Institution
Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
396
Lastpage
399
Abstract
Based on slope-deflection equations, we theoretically derived a determinant D as a criterion, in terms of structural and material properties, to determine if the bistability can occur for micro mechanically bistable mechanisms. When D <; 0, it will display bistable phenomenon if an appropriate force is applied to push the bistable mechanism; while D >; 0, bistable phenomenon cannot occur. The proposed bistable mechanisms have been successfully fabricated with different beam length and tilted angle. Experiments were conducted to validate the theoretical study for bistability. Comparing theoretical results with experimental ones, it showed theoretical solutions agree well with experimental results.
Keywords
beams (structures); micromechanical devices; beam length; bistability; bistable criterion; bistable phenomenon; mechanically bistable mechanism; slope-deflection equation; Actuators; Equations; Force; Probes; Silicon on insulator technology; Sockets; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170163
Filename
6170163
Link To Document