• DocumentCode
    3546567
  • Title

    Bistable criterion for mechanically bistable mechanism

  • Author

    Wu, Cho-Chun ; Lin, Meng-Ju ; Chen, Rongshun

  • Author_Institution
    Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    396
  • Lastpage
    399
  • Abstract
    Based on slope-deflection equations, we theoretically derived a determinant D as a criterion, in terms of structural and material properties, to determine if the bistability can occur for micro mechanically bistable mechanisms. When D <; 0, it will display bistable phenomenon if an appropriate force is applied to push the bistable mechanism; while D >; 0, bistable phenomenon cannot occur. The proposed bistable mechanisms have been successfully fabricated with different beam length and tilted angle. Experiments were conducted to validate the theoretical study for bistability. Comparing theoretical results with experimental ones, it showed theoretical solutions agree well with experimental results.
  • Keywords
    beams (structures); micromechanical devices; beam length; bistability; bistable criterion; bistable phenomenon; mechanically bistable mechanism; slope-deflection equation; Actuators; Equations; Force; Probes; Silicon on insulator technology; Sockets; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170163
  • Filename
    6170163