Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer

This paper reports a method to measure the fully described dynamic sensitivity of three-axis accelerometers represented by 3-by-3 matrix. It can be derived through the measurements of the linearly independent amplitude vectors of input acceleration three times using the three degrees of freedom shaker. The sensitivity matrix of an SOI capacitive accelerometer with vertical combs has been measured, showing a good frequency response up to 100 Hz. The cross sensitivity shows the mechanical and electrical coupling between axes, but it can be compensated using the measured sensitivity matrix.