Title :
An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever
Author :
Kobayashi, T. ; Oyama, S. ; Okada, H. ; Makimoto, N. ; Tanaka, K. ; Itoh, T. ; Maeda, R.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
We have developed MEMS-based electrostatic field sensors (MEMS-EFS), which integrate a probe to detect electrostatic field and Pb(Zr, Ti)O3 (PZT) thin films for sensor and actuator into micro cantilevers. The MEMS-EFS were fabricated through sol-gel deposition of PZT thin films and MEMS microfabrication process. Self-excited vibration of the micro cantilevers has been achieved by amplifying and forwarding the output voltage from the PZT thin films for sensor with a band-pass filter circuit. The developed MEMS-EFS can evaluate an electrostatic field of -3 to 3 kV with good linearity.
Keywords :
band-pass filters; cantilevers; electric sensing devices; electrostatic actuators; lead compounds; microfabrication; micromechanical devices; piezoelectric actuators; piezoelectric thin films; sol-gel processing; thin film sensors; vibrations; MEMS microfabrication process; MEMS-EFS; MEMS-based electrostatic field sensors; PZT; PZT thin films; actuator integrated piezoelectric microcantilever; band-pass filter circuit; electrostatic field detection; self-excited vibration; sol-gel deposition; voltage -3 kV to 3 kV; Actuators; Band pass filters; Electrostatic measurements; Electrostatics; Micromechanical devices; Probes; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170178
