DocumentCode
3546628
Title
Conception and fabrication of piezo-resistive ring-shaped AFM probes
Author
Xiong, Z. ; Walter, B. ; Mairiaux, E. ; Faucher, M. ; Buchaillot, L. ; Legrand, B.
Author_Institution
NAM6 Group, Inst. d´´Electron., de Microelectron. et de Nanotechnol.-IEMN, France
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
547
Lastpage
550
Abstract
A new concept of Atomic Force Microscope (AFM) oscillating probes using electrostatic excitation and piezoresistive detection is presented. The probe is characterized by electrical methods in vacuum chamber and by mechanical methods in air. The frequency-mixing measurement technique is developed to reduce the parasitic signal level. These probes resonance frequencies are in the 1MHz range and the quality factor is measured about 53,000 in vacuum and 3,000 in air. The force resolution deduced from the measurements is about 8 pN/Hz0.5.
Keywords
atomic force microscopy; piezoresistive devices; atomic force microscope; electrical methods; electrostatic excitation; frequency 1 MHz; frequency mixing measurement; piezoresistive ring shaped AFM probes; vacuum chamber; Force; Frequency measurement; Probes; Q factor; Resonant frequency; Silicon; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170180
Filename
6170180
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