A nanochannel fabrication technique by two-photon direct laser writing

We present a simple, fast nanochannel fabrication technique to develop hundred nanometer sized channels based on two-photon direct laser writing. By controlling laser power and location of a focused beam, we fabricated nanolines having minimum width of 180 nm. We also obtained nanochannels in the area of 110 μm × 25 μm by laser-writing with process time of 1 hour and verified rhodamine solution flowed into the nanochannels of 400 nm in width. Furthermore, this process can add desired nanochannels inside of pre-existing microfluidic systems. Therefore, we envision that the proposed nanochannel fabrication technique will facilitate technologies to detect DNA, proteins and chemicals in microfluidic systems.