Title :
High frequency torsional MEMS scanner for displays
Author :
Baran, U. ; Brown, D. ; Holmstrom, S. ; Balma, D. ; Davis, W.O. ; Mazzalai, A. ; Muralt, P. ; Urey, H.
Author_Institution :
Koc Univ., Istanbul, Turkey
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.
Keywords :
micromechanical devices; resonance; torsion; displays; frequency 39870 Hz; high frequency resonant torsional microscanner; high frequency torsional MEMS scanner; mechanical resonance frequency; mobile laser projectors; optical scan angle; sinusoidal actuation; thin film PZT; voltage 24 V; Micromechanical devices; Mirrors; Optical device fabrication; Optical films; Optical imaging; Optical sensors; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170191
