Title :
Device and method for the measurement of anchor shear strength in MEMS devices
Author :
De Coster, J. ; Picco, A. ; De Wolf, I.
Author_Institution :
IMEC, Leuven, Belgium
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
A reliability test structure for measuring the mechanical strength of anchors in MEMS devices is presented in this paper. It consists of an in-plane lateral-mode comb drive actuator that pushes against test anchors of various sizes. The motion of the actuator is characterised using stroboscopic video microscopy. This allows the generated force to be calibrated and the yield force is then measured for anchors of different sizes. A consistent yield stress of about 1GPa is obtained for the different test structures.
Keywords :
mechanical variables measurement; micromechanical devices; microscopy; reliability; shear strength; MEMS devices; anchor shear strength measurement; in plane lateral mode comb drive actuator; mechanical strength; reliability test structure; stroboscopic video microscopy; Actuators; Force; Frequency measurement; Micromechanical devices; Resonant frequency; Stress; Voltage measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170216
