DocumentCode :
3546769
Title :
Inorganic/Parylene composite thin film toward 3D robust structures
Author :
Hori, M. ; Kiriya, D. ; Takeuchi, S.
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
448
Lastpage :
451
Abstract :
We report a composite thin film consisting of inorganic calcium carbonate (CaCO3) crystals and organic Parylene. The CaCO3 crystals were grown on a surface of poly(vinyl alcohol) (PVA) on Parylene and covered the whole region of organic surface homogeneously. The thickness of CaCO3 crystals was about 180 nm and that of organic layers of Parylene with PVA was about 2 μm. Importantly, the thin film shows synergistic properties of CaCO3 crystals and Parylene; the film shows transparency, handleability, shape adjustability and resistivity for fire. Our results indicate that our approach should be useful for harnessing both inorganic and organic properties synergistically.
Keywords :
calcium compounds; composite materials; crystal growth; semiconductor thin films; 3D robust structures; CaCO3; inorganic calcium carbonate; inorganic properties; inorganic/parylene composite thin film; poly(vinyl alcohol); Conductivity; Crystals; Fabrication; Films; Fires; Organic materials; Shape;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170222
Filename :
6170222
Link To Document :
بازگشت