Title :
Inorganic/Parylene composite thin film toward 3D robust structures
Author :
Hori, M. ; Kiriya, D. ; Takeuchi, S.
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
We report a composite thin film consisting of inorganic calcium carbonate (CaCO3) crystals and organic Parylene. The CaCO3 crystals were grown on a surface of poly(vinyl alcohol) (PVA) on Parylene and covered the whole region of organic surface homogeneously. The thickness of CaCO3 crystals was about 180 nm and that of organic layers of Parylene with PVA was about 2 μm. Importantly, the thin film shows synergistic properties of CaCO3 crystals and Parylene; the film shows transparency, handleability, shape adjustability and resistivity for fire. Our results indicate that our approach should be useful for harnessing both inorganic and organic properties synergistically.
Keywords :
calcium compounds; composite materials; crystal growth; semiconductor thin films; 3D robust structures; CaCO3; inorganic calcium carbonate; inorganic properties; inorganic/parylene composite thin film; poly(vinyl alcohol); Conductivity; Crystals; Fabrication; Films; Fires; Organic materials; Shape;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170222