Mechanical characterization of all-polymer/carbon nanotube composite micro-resonators

Author

Sousa, P.M. ; Chu, V. ; Conde, J.P.

Author_Institution

INESC Microsistemas e Nanotecnologias (INESC-MN), IN-Inst. of Nanosci. & Nanotechnol., Lisbon, Portugal

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

456

Lastpage

459

Abstract

The possibility to adjust the mechanical and surface properties of polymers could lead to the development of micro-electromechanical systems (MEMS) with novel functionalities. The effect of ambient pressure, applied load, number of vibration cycles, and temperature on the resonance frequency and quality factor of all-polymer MEMS (pMEMS) resonator bridges with integrated carboxylated multi-wall carbon-nanotubes (CNT) is presented. The pMEMS structural layer consists of a multilayer blended electrically conductive polymer based on poly(3,4-ethylenedioxythiophene):poly (styrenesulfonate) (PEDOT:PSS) to which CNT monolayers are electrostatically attached. The electrostatically actuated pMEMS bridges were studied as a function of their length for different multilayer compositions.

Keywords

Q-factor; carbon nanotubes; conducting polymers; micromechanical resonators; CNT monolayers; all-polymer-carbon nanotube composite microresonators; ambient pressure; applied load; mechanical characterization; micro-electromechanical systems; multilayer blended electrically conductive polymer; multilayer compositions; pMEMS structural layer; quality factor; surface properties; vibration cycles; Bridge circuits; Bridges; Hysteresis; Micromechanical devices; Plastics; Resonant frequency; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170224

Filename

6170224