Title :
Ultra-flexible devices for 360 μm diameter guidewires
Author :
Mimoun, B. ; Henneken, V. ; Sarro, P.M. ; Dekker, R.
Author_Institution :
Delft Univ. of Technol., Delft, Netherlands
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
We report on the mechanical and electrical integrity of an ultra-flexible polyimide-based sensor platform for minimally invasive medical instruments. Aluminum structures placed in the stress neutral plane, the tensile plane or a combination of both are fabricated and tested under bending down to 300 μm diameter. The obtained results provide design rules for ultra-flexible flow sensors to be implemented in 360 μm diameter guidewires, while keeping direct contact with the surrounding environment. The need for design rules is further supported by simulations made using an analytical model especially developed for stress-strain modeling in flexible devices with externally applied bending.
Keywords :
bioMEMS; biomedical equipment; flexible electronics; flow sensors; pressure sensors; stress-strain relations; aluminum structures; electrical integrity; guidewires; mechanical integrity; minimally invasive medical instruments; size 360 mum; stress neutral plane; stress-strain modeling; ultra-flexible devices; ultra-flexible flow sensors; ultra-flexible polyimide-based sensor platform; Analytical models; Fabrication; Layout; Sensors; Silicon; Strain; Stress;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170227