Title :
Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometer
Author :
Xie, Zhongjian ; Chang, Honglong ; Yang, Yong ; Li, Xiaoqing ; Zhou, Pingwei ; Yuan, Weizheng
Author_Institution :
MEMS Lab., Northwestern Polytech. Univ., Xi´´an, China
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper reports a novel vortex multi-axis inertial sensor, which can detect three components of angular rate and three components of linear acceleration simultaneously. It uses a vortex gas flow instead of the traditional linear gas flow as the inertial mass to detect the angular rate and linear acceleration. In the implementation, the vortex was formed by jetting the gas into a round chamber through two opposing nozzle orifices in the opposite direction. And the multi-axis detection was realized by a proper configuration of thermistors. The test results show that both the gyroscopes and accelerometers can reach a medium accuracy, which proves the feasibility of the device.
Keywords :
accelerometers; gyroscopes; microsensors; nozzles; thermistors; 3-DOF accelerometer; 3-DOF gyroscope; angular rate; linear acceleration; linear gas flow as; nozzle orifices; vortex gas flow; vortex multi-axis inertial sensor; Acceleration; Fluid flow; Gyroscopes; Orifices; Resistance; Sensors; Thermistors; 3-axis accelerometer; 3-axis gyroscope; Vortex inertial sensor; thermal convective; thermistor;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170235