Title :
DNA origami imaging with 10.9 MHz AFM MEMS probes
Author :
Walter, B. ; Mairiaux, E. ; Xiong, Z. ; Faucher, M. ; Buchaillot, L. ; Legrand, B.
Author_Institution :
Inst. d´´Electron., de Microelectron. et de Nanotechnol. - IEMN, Villeneuve-d´´Ascq, France
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
For the first time, 100nm side DNA origami squares have been imaged using 10.9MHz laserless AFM MEMS probe. This sensor takes advantage of the high resonance frequency of a silicon bulk mode resonator integrating a nano-tip fabricated in batch process. After integration in a commercially available AFM set-up with a modified probe holder, the AFM MEMS probe has demonstrated its capability of soft matter imaging.
Keywords :
atomic force microscopy; batch processing (industrial); biomedical imaging; microsensors; DNA origami imaging; DNA origami squares; batch process; frequency 10.9 MHz; laserless AFM MEMS probe; modified probe holder; nano-tip; silicon bulk mode resonator; Electrodes; Measurement by laser beam; Nanobioscience; Optical resonators; Probes; Resonant frequency; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170236
