Title :
Electrostatic self-calibration of vibratory gyroscopes
Author :
Casinovi, G. ; Sung, W.K. ; Dalal, M. ; Shirazi, A.N. ; Ayazi, F.
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper introduces a new approach to self-calibration of Coriolis-based vibratory gyroscopes that does not require the use of any additional moving parts or a calibration stage. Instead, the effect of the Coriolis force on the device is mimicked by the application of a rotating excitation to the device drive and sense modes. This calibration method is based on the theoretical analysis of an equivalent 2-DOF mass-spring model, which can be used to describe the behavior of a variety of MEMS gyroscopes. The method is validated both by the results of finite-element simulations and by experimental measurement.
Keywords :
calibration; finite element analysis; gyroscopes; microsensors; Coriolis-based vibratory gyroscopes; MEMS gyroscopes; device drive; electrostatic self-calibration; equivalent 2-DOF mass-spring model; finite-element simulations; rotating excitation; sense modes; Calibration; Electrodes; Force; Gyroscopes; Phase measurement; Resonant frequency; Rotation measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170237