MEMS absolute pressure sensor on a flexible substrate

Author

Ahmed, Moinuddin ; Butler, Donald P. ; Celik-Butler, Zeynep

Author_Institution

Dept. of Electr. Eng., Univ. of Texas, Arlington, TX, USA

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

575

Lastpage

578

Abstract

This paper describes the fabrication and characterization of micromachined, piezoresistive, absolute pressure sensors sandwiched between a flexible polyimide. The sensors are designed for structural health monitoring in aerospace applications. A suspended aluminum oxide diaphragm is utilized where nichrome (Ni-80%/Cr-20%) piezoresistive sensors are placed in a half Wheatstone bridge geometry to ensure a linear response and thermal stability. The sensitivity was found to be 1.51 nV/Pa with an average dynamic range of 8.31 MPa.

Keywords

aerospace engineering; alumina; condition monitoring; micromachining; microsensors; piezoresistive devices; pressure sensors; structural engineering; substrates; thermal stability; Al₂O₃; MEMS absolute pressure sensor; aerospace applications; flexible polyimide; flexible substrate; half Wheatstone bridge geometry; linear response; micromachined sensors; nichrome piezoresistive sensors; pressure 8.31 MPa; structural health monitoring; suspended diaphragm; thermal stability; Aluminum oxide; Fabrication; Piezoresistance; Polyimides; Sensitivity; Substrates; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170240

Filename

6170240