Title :
MEMS absolute pressure sensor on a flexible substrate
Author :
Ahmed, Moinuddin ; Butler, Donald P. ; Celik-Butler, Zeynep
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas, Arlington, TX, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper describes the fabrication and characterization of micromachined, piezoresistive, absolute pressure sensors sandwiched between a flexible polyimide. The sensors are designed for structural health monitoring in aerospace applications. A suspended aluminum oxide diaphragm is utilized where nichrome (Ni-80%/Cr-20%) piezoresistive sensors are placed in a half Wheatstone bridge geometry to ensure a linear response and thermal stability. The sensitivity was found to be 1.51 nV/Pa with an average dynamic range of 8.31 MPa.
Keywords :
aerospace engineering; alumina; condition monitoring; micromachining; microsensors; piezoresistive devices; pressure sensors; structural engineering; substrates; thermal stability; Al2O3; MEMS absolute pressure sensor; aerospace applications; flexible polyimide; flexible substrate; half Wheatstone bridge geometry; linear response; micromachined sensors; nichrome piezoresistive sensors; pressure 8.31 MPa; structural health monitoring; suspended diaphragm; thermal stability; Aluminum oxide; Fabrication; Piezoresistance; Polyimides; Sensitivity; Substrates; Voltage measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170240
