Title :
A 100 kHz vibratory MEMS rate gyroscope with experimental verification of system model´s frequency scaling
Author :
Liewald, J. -T ; Kuhlmann, B. ; Balslink, T. ; Manoli, Y.
Author_Institution :
Automotive Electron., Robert BOSCH GmbH, Stuttgart, Germany
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
The working frequency f0 of vibratory MEMS angular rate sensors is a main optimization parameter. To investigate the specific challenges of increasing f0 we designed a new device with f0=100 kHz. Key parameters of the 100 kHz device are theoretically and experimentally compared with those of a 15 kHz reference sensor. The experimental results show the validity of the theoretical frequency scaling of the key parameters. The measurements show benefits and disadvantages of MEMS vibratory gyroscopes with increased f0>;>;30 kHz.
Keywords :
angular velocity measurement; gyroscopes; microsensors; MEMS angular rate sensors; MEMS vibratory gyroscopes; frequency 100 kHz; frequency 15 kHz; frequency scaling; system model; Frequency measurement; Gyroscopes; Micromechanical devices; Oscillators; Resonant frequency; Sensitivity; Sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170245
