Title :
Integration of EWOD pumping device in deep microfluidic channels using a three-dimensional shadowmask
Author :
Morishita, S. ; Kubota, M. ; Mita, Y.
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
A droplet propulsion system based on the electrowetting-on-dielectric (EWOD) is integrated in deep-trench microfluidic channels. Due to the unique three-dimensional multi-height silicon shadowmask, electrodes are simultaneously fabricated on the top, bottom and vertical walls of deep channels, thus enabling three-face EWOD driving by both the bottom and sidewalls. We have successfully moved a water droplet in a 230μm-deep, 750μm-wide trench by EWOD.
Keywords :
microchannel flow; pumps; silicon; EWOD pumping device; deep-trench microfluidic channels; electrowetting-on-dielectric; size 230 mum; size 750 mum; three-dimensional multiheight silicon shadowmask; water droplet; Electrodes; Force; Lab-on-a-chip; Lithography; Microfluidics; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170250
