DocumentCode
3546924
Title
Graphene has ultra high piezoresistive gauge factor
Author
Hosseinzadegan, H. ; Todd, C. ; Lal, A. ; Pandey, M. ; Levendorf, M. ; Park, J.
Author_Institution
SonicMEMS Lab., Cornell Univ., Ithaca, NY, USA
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
611
Lastpage
614
Abstract
We report the first-ever use of graphene as a piezoresistive element in a MEMS device, and report on a giant piezoresistivity in the graphene films used on our devices. Owing to the layer nature and the effective confinement of electrons in two-dimensions, applied strain in the graphene films is likely to create large changes in conductivity as the electrons are forces to traverse larger potential wells along increased bond-lengths or result in modulation of current along grain boundaries and multiple graphene layers. In this paper we report a very high piezoresistive gauge factor of 1.8×104. This gauge factor is orders of magnitude higher than that of most piezoresistive materials used in MEMS. This high value of piezoresistivity could be transformative in reinterpretation of the use of piezoresistivity for various hybrid transduction approaches.
Keywords
bond lengths; electrical conductivity; fullerene devices; grain boundaries; graphene; micromechanical devices; piezoelectric thin films; piezoresistive devices; C; MEMS device; bond length; current modulation; electrical conductivity; giant piezoresistivity; grain boundaries; graphene films; hybrid transduction approach; ultra high piezoresistive gauge factor; Conductivity; Current measurement; Electrodes; Films; Piezoresistance; Strain; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170262
Filename
6170262
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