DocumentCode :
3546924
Title :
Graphene has ultra high piezoresistive gauge factor
Author :
Hosseinzadegan, H. ; Todd, C. ; Lal, A. ; Pandey, M. ; Levendorf, M. ; Park, J.
Author_Institution :
SonicMEMS Lab., Cornell Univ., Ithaca, NY, USA
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
611
Lastpage :
614
Abstract :
We report the first-ever use of graphene as a piezoresistive element in a MEMS device, and report on a giant piezoresistivity in the graphene films used on our devices. Owing to the layer nature and the effective confinement of electrons in two-dimensions, applied strain in the graphene films is likely to create large changes in conductivity as the electrons are forces to traverse larger potential wells along increased bond-lengths or result in modulation of current along grain boundaries and multiple graphene layers. In this paper we report a very high piezoresistive gauge factor of 1.8×104. This gauge factor is orders of magnitude higher than that of most piezoresistive materials used in MEMS. This high value of piezoresistivity could be transformative in reinterpretation of the use of piezoresistivity for various hybrid transduction approaches.
Keywords :
bond lengths; electrical conductivity; fullerene devices; grain boundaries; graphene; micromechanical devices; piezoelectric thin films; piezoresistive devices; C; MEMS device; bond length; current modulation; electrical conductivity; giant piezoresistivity; grain boundaries; graphene films; hybrid transduction approach; ultra high piezoresistive gauge factor; Conductivity; Current measurement; Electrodes; Films; Piezoresistance; Strain; Voltage measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170262
Filename :
6170262
Link To Document :
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