• DocumentCode
    3546924
  • Title

    Graphene has ultra high piezoresistive gauge factor

  • Author

    Hosseinzadegan, H. ; Todd, C. ; Lal, A. ; Pandey, M. ; Levendorf, M. ; Park, J.

  • Author_Institution
    SonicMEMS Lab., Cornell Univ., Ithaca, NY, USA
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    611
  • Lastpage
    614
  • Abstract
    We report the first-ever use of graphene as a piezoresistive element in a MEMS device, and report on a giant piezoresistivity in the graphene films used on our devices. Owing to the layer nature and the effective confinement of electrons in two-dimensions, applied strain in the graphene films is likely to create large changes in conductivity as the electrons are forces to traverse larger potential wells along increased bond-lengths or result in modulation of current along grain boundaries and multiple graphene layers. In this paper we report a very high piezoresistive gauge factor of 1.8×104. This gauge factor is orders of magnitude higher than that of most piezoresistive materials used in MEMS. This high value of piezoresistivity could be transformative in reinterpretation of the use of piezoresistivity for various hybrid transduction approaches.
  • Keywords
    bond lengths; electrical conductivity; fullerene devices; grain boundaries; graphene; micromechanical devices; piezoelectric thin films; piezoresistive devices; C; MEMS device; bond length; current modulation; electrical conductivity; giant piezoresistivity; grain boundaries; graphene films; hybrid transduction approach; ultra high piezoresistive gauge factor; Conductivity; Current measurement; Electrodes; Films; Piezoresistance; Strain; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170262
  • Filename
    6170262