Title :
Self-aligned VCSEL-microlens scanner with large scan range
Author :
Quack, N. ; Chou, J.B. ; Wu, M.C.
Author_Institution :
Berkeley Sensor & Actuator Center (BSAC), Univ. of California, Berkeley, CA, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper reports on the design, fabrication and optical characterization of a self-aligned microlaser scanning system consisting of a vertical cavity surface emitting laser (VCSEL) source and a MEMS-actuated microlens scanner. The alignment and the spacing between the VCSEL and the MEMS scanner are achieved through lithographically patterned alignment grooves and precision micro-beads. Horizontal displacements of ±70 μm, corresponding to scanning angles of ±7°, have been demonstrated.
Keywords :
microactuators; microlenses; optical design techniques; optical fabrication; optical scanners; surface emitting lasers; MEMS actuated microlens scanner; large scan range; optical characterization; optical design; optical fabrication; self aligned VCSEL microlens scanner; self aligned microlaser scanning system; vertical cavity surface emitting laser; Actuators; Assembly; Laser beams; Lenses; Micromechanical devices; Suspensions; Vertical cavity surface emitting lasers;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170272
