Title :
1.12GHz Opto-Acoustic Oscillator
Author :
Sridaran, Suresh ; Bhave, Sunil A.
Author_Institution :
Cornell Univ., Ithaca, NY, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
We report on the development of a GHz Opto-Acoustic Oscillator (OAO) using an air gap capacitively actuated silicon optomechanical resonator. An optical sensing technique using optomechanical ring resonators in silicon allows for observation of the mechanical resonances of electrostatically excited resonators up to 3.5GHz. Using amplifiers to compensate for losses, we demonstrate an oscillator operating at 1.12GHz with 8.8dBm output RF power and a phase noise of -85 dBc/Hz at 10 kHz offset.
Keywords :
electrostatic devices; micro-optomechanical devices; microactuators; micromechanical resonators; optical resonators; oscillators; Si; air gap; capacitively actuated optomechanical resonator; electrostatically excited resonators; frequency 1.12 GHz; mechanical resonance; optical sensing technique; opto-acoustic oscillator; optomechanical ring resonators; Optical imaging; Optical modulation; Optical ring resonators; Optical sensors; Oscillators; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170274
