1 Volt digital logic circuits realized by stress-resilient ALN parallel dual-beam MEMS relays

This paper reports on the first implementation of low-voltage (~ 1 V_pp) complementary logic elements achieved by body-biasing of novel parallel dual-beam design piezoelectric mechanical relays. By leveraging the mechanical actuation and the nature of these switches we have been able to develop and demonstrate a 2-to-1 multiplexer (mux) based logic design architecture that results in reduced component counts. Low-voltage (1 V_pp), lithographically integrated logic elements such as XOR, OR, AND, Half-Adder, Latch, and a 2-Stage Inverter have been synthesized by using the mux as a building block. This constitutes a step forward in the development of a low energy mechanical computing platform.