Acoustic whispering gallery mode resonator with Q > 109,000 at 515MHz

Author

Rocheleau, Tristan O. ; Naing, Thura Lin ; Ren, Zeying ; Nguyen, Clark T -C

Author_Institution

Univ. of California, Berkeley, CA, USA

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

672

Lastpage

675

Abstract

A capacitive-gap transduced micromechanical resonator design based on an acoustic whispering gallery mode (WGM) constructed in micro-crystalline diamond has achieved a Q >;109,000 at 515MHz, posting an f·Q product of >;5.6×10¹³. The key to this performance is anchor-loss nulling by the WGM, as evidenced by comparison of Q values between radial-contour modes and WGM ones on the same disk device, where a 2-3× enhancement of Q is observed. Q´s exceeding 100,000 should enable unprecedented RF front-end frequency selectivity and low phase noise oscillators for future communications.

Keywords

Q-factor; micromechanical resonators; oscillators; whispering gallery modes; RF front-end frequency selectivity; WGM; acoustic whispering gallery mode resonator; anchor-loss nulling; capacitive-gap; frequency 515 MHz; microcrystalline diamond; phase noise oscillator; radial-contour mode; transduced micromechanical resonator; Acoustics; Diamond-like carbon; Electrodes; Frequency measurement; Resonant frequency; Whispering gallery modes;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170276

Filename

6170276