Monolithic SU-8 based hollow waveguide with integrated electro thermally tunable iris filter for W-band applications

Author

Kohlstedt, A. ; Dassinger, F. ; Schlaak, F. ; Fritzsch, C. ; Jakoby, R.

Author_Institution

Inst. of Electromech. Design, Tech. Univ. Darmstadt, Darmstadt, Germany

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

713

Lastpage

716

Abstract

This paper reports the design and fabrication of a new generation of micromechanically fabricated hollow waveguides for the W-band (75-110 GHz). It is based on UV high aspect ratio lithography for 1.27 mm SU-8 thick films on PCB substrates. The epoxy based negative resist provides the means to monolithically integrate electro thermal actuators. This enables the realization of tunable waveguide components like the described iris filter design.

Keywords

MIMIC; lithography; microactuators; microfabrication; millimetre wave filters; printed circuits; waveguide filters; PCB substrate; UV high aspect ratio lithography; W-band application; epoxy based negative resist; frequency 75 GHz to 110 GHz; integrated electro thermally tunable iris filter; micromechanically fabricated hollow waveguide; monolithic SU-8 based hollow waveguide; monolithically integrate electrothermal actuator; size 1.27 mm; tunable waveguide component; Actuators; Copper; Fabrication; Heating; Iris; Microwave filters; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170286

Filename

6170286