Title :
Monolithic SU-8 based hollow waveguide with integrated electro thermally tunable iris filter for W-band applications
Author :
Kohlstedt, A. ; Dassinger, F. ; Schlaak, F. ; Fritzsch, C. ; Jakoby, R.
Author_Institution :
Inst. of Electromech. Design, Tech. Univ. Darmstadt, Darmstadt, Germany
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper reports the design and fabrication of a new generation of micromechanically fabricated hollow waveguides for the W-band (75-110 GHz). It is based on UV high aspect ratio lithography for 1.27 mm SU-8 thick films on PCB substrates. The epoxy based negative resist provides the means to monolithically integrate electro thermal actuators. This enables the realization of tunable waveguide components like the described iris filter design.
Keywords :
MIMIC; lithography; microactuators; microfabrication; millimetre wave filters; printed circuits; waveguide filters; PCB substrate; UV high aspect ratio lithography; W-band application; epoxy based negative resist; frequency 75 GHz to 110 GHz; integrated electro thermally tunable iris filter; micromechanically fabricated hollow waveguide; monolithic SU-8 based hollow waveguide; monolithically integrate electrothermal actuator; size 1.27 mm; tunable waveguide component; Actuators; Copper; Fabrication; Heating; Iris; Microwave filters; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170286
