Title :
Stacked-spiral RF inductors with vertical nano-particle-magnetic-medium
Author :
Yang, C. ; Zhan, J. ; Wang, X. ; Fang, Q. ; Shi, Z. ; Yang, Y. ; Ren, T.-L. ; Wang, A. ; Cheng, Y. ; Li, X.
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
A new concept of stacked-spiral inductor with vertical near-closed-circuit nano-particle-magnetic-core in CMOS is reported. Prototypes, fabricated in a 6-Al-metal CMOS backend process using ferrite nano-particles, show a high inductance-density of 825nH/mm2 in multi-GHz, which is promising for making super compact inductors in RF SoC.
Keywords :
CMOS digital integrated circuits; aluminium; inductors; magnetic cores; nanoparticles; radiofrequency integrated circuits; system-on-chip; 6-metal CMOS backend process; Al; RF SoC; ferrite nanoparticles; stacked-spiral RF inductors; super compact inductors; system-on-chip; vertical near-closed-circuit nanoparticle-magnetic-core; Ferrites; Inductors; Magnetic flux; Magnetic resonance; Radio frequency; Spirals; System-on-a-chip;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170287
