DocumentCode :
3547080
Title :
CNT-FET gas sensor using a functionalized ionic liquid as gate
Author :
Kiga, N. ; Takei, Y. ; Inaba, A. ; Takahashi, H. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
796
Lastpage :
799
Abstract :
We propose a gas sensor using combination of carbon nanotubes (CNTs) and ionic liquid (IL). In our research, we used IL, 1-ethyl-3-methyl imidazolium tetrafluoroborate ([EMIM][BF4]) which specially absorbs CO2/NH3, and polymer, polyethyleneimine (PEI) which absorbs CO2. This IL or the mixture of IL and PEI dropped on the CNT-FET were applied as a CNT-FET IL-gate and a surface modification material of CNTs. When the IL absorbs specific gases, the ion types and concentrations change. We measured the change of CNT I-V property by applying a voltage to the IL-gate to attract the ions onto the CNT surface.
Keywords :
carbon nanotube field effect transistors; gas sensors; nanosensors; polymers; 1-ethyl-3-methyl imidazolium tetrafluoroborate; C; CNT I-V property; CNT surface; CNT-FET IL-gate; CNT-FET gas sensor; PEI; carbon nanotube; functionalized ionic liquid; gas absorbtion; polyethyleneimine; surface modification material; Electrodes; Gas detectors; Ions; Logic gates; Water;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170306
Filename :
6170306
Link To Document :
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