• DocumentCode
    3547104
  • Title

    Functionalized micro bead with liquid-core Parylene-shell structure

  • Author

    Aoki, H. ; Binh-Khiem, N. ; Kan, T. ; Matsumoto, K. ; Shimoyama, I.

  • Author_Institution
    Univ. of Tokyo, Tokyo, Japan
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    831
  • Lastpage
    834
  • Abstract
    We report on the fabrication, properties and applications of liquid-core Parylene-shell micro bead (LCPS-bead). Functionalized liquid substances and liquid mixtures are usually used as reagents or indicators. When these chemicals are used in biochemical measurements where liquids are often abundant in the ambience, they tend to absorb or mix with the surrounding liquid, and thus change their properties and functionalities. In order to eliminate this disadvantage, we proposed the liquid encapsulated beads. The LCPS-beads were fabricated in two-steps: 1) impregnating porous solid beads with functionalized liquid, 2) encapsulating the beads with Parylene film. We showed that the proposed method provided efficient encapsulating shell to protect the core-liquid from surrounding solvents, thus it enables long time use of the liquid function in the solvents. We demonstrated two applications of the LCPS-beads: micro bead type temperature sensor and pH indicator bead.
  • Keywords
    absorption; biochemistry; chemical sensors; encapsulation; liquid mixtures; microfabrication; microsensors; pH measurement; porous materials; absorption; biochemical measurements; functionalized liquid substances; impregnating porous solid beads; liquid encapsulated microbeads; liquid mixtures; liquid-core parylene-shell structure; micro bead type temperature sensor; pH indicator bead; parylene film; shell encapsulation; Containers; Ethanol; Films; Fluorescence; Silicon compounds; Solvents; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170314
  • Filename
    6170314