DocumentCode
3547104
Title
Functionalized micro bead with liquid-core Parylene-shell structure
Author
Aoki, H. ; Binh-Khiem, N. ; Kan, T. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution
Univ. of Tokyo, Tokyo, Japan
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
831
Lastpage
834
Abstract
We report on the fabrication, properties and applications of liquid-core Parylene-shell micro bead (LCPS-bead). Functionalized liquid substances and liquid mixtures are usually used as reagents or indicators. When these chemicals are used in biochemical measurements where liquids are often abundant in the ambience, they tend to absorb or mix with the surrounding liquid, and thus change their properties and functionalities. In order to eliminate this disadvantage, we proposed the liquid encapsulated beads. The LCPS-beads were fabricated in two-steps: 1) impregnating porous solid beads with functionalized liquid, 2) encapsulating the beads with Parylene film. We showed that the proposed method provided efficient encapsulating shell to protect the core-liquid from surrounding solvents, thus it enables long time use of the liquid function in the solvents. We demonstrated two applications of the LCPS-beads: micro bead type temperature sensor and pH indicator bead.
Keywords
absorption; biochemistry; chemical sensors; encapsulation; liquid mixtures; microfabrication; microsensors; pH measurement; porous materials; absorption; biochemical measurements; functionalized liquid substances; impregnating porous solid beads; liquid encapsulated microbeads; liquid mixtures; liquid-core parylene-shell structure; micro bead type temperature sensor; pH indicator bead; parylene film; shell encapsulation; Containers; Ethanol; Films; Fluorescence; Silicon compounds; Solvents; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170314
Filename
6170314
Link To Document