Integrated VOC vapor sensing on FBAR-CMOS array

This paper reports first results of volatile organic compound (VOC) detection on a monolithically integrated film bulk acoustic resonator (FBAR) array on a silicon integrated circuit substrate. The combined sensor platform uses thin polymer layers as gas absorbers for individual FBAR functionalization, and frequency shifts are measured on-chip in response to changing VOC concentration. Integrating sensors, drive, and readout functionality on a single CMOS die enables a robust, multiplex sensor platform and obviates external measurement equipment.