Title :
High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors
Author :
Verd, Jaume ; Abadal, Gabriel ; Teva, Jordi ; Uranga, Arantxa ; Barniol, Núria ; Esteve, Jaume ; Duch, Marta ; Pérez-Murano, Francesc
Author_Institution :
Dept. Enginyeria Electronica, Univ. Autonoma de Barcelona, Bellaterra, Spain
Abstract :
We present a capacitive readout system used to detect the oscillation of a submicrometer-scale cantilever integrated monolithically in a 3.3 V, 0.35 μm CMOS standard technology from AMS. This readout system presents a total parasitic capacitance at the sense node as low as 11 fF. This parasitic capacitance is used to integrate the current generated by the cantilever-driver system that is electrostatically excited, resulting on a high-sensitivity readout system of 542×103 V/m with a BW of 47 MHz (@30 pF).
Keywords :
CMOS analogue integrated circuits; capacitive sensors; displacement measurement; integrating circuits; micromechanical resonators; microsensors; readout electronics; 0.35 micron; 11 fF; 3.3 V; 30 pF; 47 MHz; CMOS standard technology; electrostatic excitation; high-sensitivity capacitive readout system; mechanical transducer; parasitic capacitance; resonant submicrometer-scale cantilevers; sensors; structure displacement detection; AC generators; Capacitive sensors; Circuits; Frequency; Motion detection; Nanoelectromechanical systems; Parasitic capacitance; Resonance; Sensor systems; Voltage;
Conference_Titel :
Circuits and Systems, 2005. ISCAS 2005. IEEE International Symposium on
Print_ISBN :
0-7803-8834-8
DOI :
10.1109/ISCAS.2005.1465559
