DocumentCode
3547244
Title
Three dimensional microfluidic design with spincoated micrometer-thin elastomer multilayer
Author
Binh-Khiem, N. ; Thanh-Vinh, N. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution
Univ. of Tokyo, Tokyo, Japan
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
1109
Lastpage
1112
Abstract
We propose a method to fabricate three dimensional microfluidic channel systems with spincoated micrometer-thin elastomer multilayer. We use the molecular diffusion of thin elastomer layers to our advantage and propose a microfluidic fabrication process free of molding and bonding steps. We achieved various expandable three dimensional multilayer channel designs that can have interesting applications.
Keywords
diffusion; elastomers; microchannel flow; microfabrication; moulding; multilayers; spin coating; bonding method; microfluidic fabrication process; molding method; molecular diffusion process; spincoated micrometer-thin elastomer multilayer; three dimensional microfluidic channel system; three dimensional microfluidic design; three dimensional multilayer channel design; Blood vessels; Fabrication; Microfluidics; Nonhomogeneous media; Resists; Solvents;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170356
Filename
6170356
Link To Document