• DocumentCode
    3547244
  • Title

    Three dimensional microfluidic design with spincoated micrometer-thin elastomer multilayer

  • Author

    Binh-Khiem, N. ; Thanh-Vinh, N. ; Matsumoto, K. ; Shimoyama, I.

  • Author_Institution
    Univ. of Tokyo, Tokyo, Japan
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    1109
  • Lastpage
    1112
  • Abstract
    We propose a method to fabricate three dimensional microfluidic channel systems with spincoated micrometer-thin elastomer multilayer. We use the molecular diffusion of thin elastomer layers to our advantage and propose a microfluidic fabrication process free of molding and bonding steps. We achieved various expandable three dimensional multilayer channel designs that can have interesting applications.
  • Keywords
    diffusion; elastomers; microchannel flow; microfabrication; moulding; multilayers; spin coating; bonding method; microfluidic fabrication process; molding method; molecular diffusion process; spincoated micrometer-thin elastomer multilayer; three dimensional microfluidic channel system; three dimensional microfluidic design; three dimensional multilayer channel design; Blood vessels; Fabrication; Microfluidics; Nonhomogeneous media; Resists; Solvents;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170356
  • Filename
    6170356