DocumentCode
3547260
Title
A nano-actuator via cavity-enhanced optical dipole force
Author
Tao, J.F. ; Wu, J. ; Cai, H. ; Zhang, Q.X. ; Kun, X. ; Tsai, J.M. ; Kwong, D.L. ; Liu, A.Q.
Author_Institution
State Key Lab. of Inf. Photonics & Opt. Commun., Beijing Univ. of Posts & Telecommun., Beijing, China
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
1125
Lastpage
1128
Abstract
In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems.
Keywords
cantilevers; microactuators; silicon; cavity-enhanced optical dipole force; monolithic cavity; nano-optomechanical system; nanoactuator; nanoscale silicon suspended cantilever; optical gradient force; optical power consumption; Force; Optical device fabrication; Optical resonators; Optical sensors; Optical surface waves; Optical waveguides; Suspensions;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170360
Filename
6170360
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