Title :
Cantilever actuated by piezoelectric Parylene-C
Author :
Kim, Justin Young-Hyun ; Nandra, Mandheerej ; Tai, Yu-Chong
Author_Institution :
California Inst. of Technol., Pasadena, MD, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
We developed the first MEMS cantilever resonator actuated by piezoelectric Parylene-C, which is a new piezoelectric material for its integration into/with MEMS because it can be deposited at room temperature and electrically poled at 200°C with 400V of DC bias. After our first report on Parylene-C as a new piezoelectric material, we demonstrated here the first MEMS cantilever resonator actuated by piezoelectric PA-C.
Keywords :
cantilevers; crystal resonators; micromechanical resonators; piezoelectric materials; MEMS cantilever resonator; piezoelectric Parylene-C; piezoelectric material; temperature 200 degC; temperature 293 K to 298 K; voltage 400 V; DVD; Etching; Laser beams; Measurement by laser beam; Micromechanical devices; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170364
