Title :
Ultrasonic electrostatic actuators on a flexible substrate
Author :
Kim, Sangpyeong ; Zhang, Xu ; Daugherty, Robin ; Lee, Ed ; Kunnen, George ; Allee, David R. ; Forsythe, Eric ; Chae, Junseok
Author_Institution :
Arizona State Univ., Tempe, AZ, USA
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
We present a MEMS-based electrostatic actuator on a flexible substrate, made of Polyethylene Naphthalate (PEN), which emits acoustic waves at ultrasonic frequencies, aiming for an ultrasound microdevice for equipment inspection. The actuator has a suspended diaphragm, made of parylene, of 2-6 mm diameter and a 6 μm gap between the diaphragm and substrate. A single actuator emits ultrasonic waves at 25 kHz, and pressure of 27 dB SPL (sound pressure level) and a 1 × 2 array emits up to 34.6 dB SPL at 1 cm distance.
Keywords :
acoustic waves; diaphragms; electrostatic actuators; inspection; ultrasonic transducers; acoustic waves; equipment inspection; flexible substrate; frequency 25 kHz; polyethylene naphthalate; size 2 mm to 6 mm; size 6 mum; sound pressure level; suspended diaphragm; ultrasonic electrostatic actuators; ultrasound microdevice; Acoustics; Actuators; Aluminum; Arrays; Micromechanical devices; Microphones; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170377
