Title :
A piezoelectric vibration harvester based on clamped-guided beams
Author :
Wang, Z. ; Matova, S. ; Elfrink, R. ; Jambunathan, M. ; de Nooijer, C. ; van Schaijk, R. ; Vullers, R.J.M.
Author_Institution :
Imec/Holst Centre, Eindhoven, Netherlands
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
The paper addresses the design, modeling, fabrication and experimental results of a piezoelectric energy harvester based on clamped-guided beams. The design is featured by shorter mass displacement and higher reliability than cantilever beams. Two separate sets of capacitors allow exploiting both tensile and compressive stress at the same time. The maximum output power reaches about 20 μW at an input acceleration of 1.2 g. A tuning range of 3 Hz is demonstrated by varying the voltage across the capacitors. Nonlinear behavior observed at larger mass displacement is also discussed.
Keywords :
capacitors; energy harvesting; piezoelectric transducers; vibrations; cantilever beams; capacitors; clamped-guided beams; compressive stress; frequency 3 Hz; mass displacement; nonlinear behavior; piezoelectric vibration harvester; reliability; tensile stress; Acceleration; Capacitors; Frequency measurement; Power generation; Resonant frequency; Tuning; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170379