DocumentCode :
3547362
Title :
SiO2 electret induced by potassium ions on a comb-drive actuator
Author :
Sugiyama, Tatsuhiko ; Aoyama, Mitsuru ; Shibata, Yasushi ; Suzuki, Masato ; Konno, Takashi ; Ataka, Manabu ; Fujita, Hiroyuki ; Hashiguchi, Gen
Author_Institution :
Shizuoka Univ., Shizuoka, Japan
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
1281
Lastpage :
1284
Abstract :
This paper reports a novel SiO2 electret on comb-drive actuator, which is formed by concise procedure and low cost. The SiO2 electret is generated by doping potassium ions and formed on vertical walls of driving electrodes in a comb-drive actuator. The current generated by the extraneous vibration was observed, so this device is thought to be useful as the vibration power generator.
Keywords :
electrets; electrostatic actuators; semiconductor doping; silicon compounds; vibrations; SiO2; comb-drive actuator; doping; electret; potassium ions; power generator; vibration; Actuators; Electrets; Electrodes; Films; Ions; Springs; Voltage measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170391
Filename :
6170391
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3547362
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