• DocumentCode
    3547362
  • Title

    SiO2 electret induced by potassium ions on a comb-drive actuator

  • Author

    Sugiyama, Tatsuhiko ; Aoyama, Mitsuru ; Shibata, Yasushi ; Suzuki, Masato ; Konno, Takashi ; Ataka, Manabu ; Fujita, Hiroyuki ; Hashiguchi, Gen

  • Author_Institution
    Shizuoka Univ., Shizuoka, Japan
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    1281
  • Lastpage
    1284
  • Abstract
    This paper reports a novel SiO2 electret on comb-drive actuator, which is formed by concise procedure and low cost. The SiO2 electret is generated by doping potassium ions and formed on vertical walls of driving electrodes in a comb-drive actuator. The current generated by the extraneous vibration was observed, so this device is thought to be useful as the vibration power generator.
  • Keywords
    electrets; electrostatic actuators; semiconductor doping; silicon compounds; vibrations; SiO2; comb-drive actuator; doping; electret; potassium ions; power generator; vibration; Actuators; Electrets; Electrodes; Films; Ions; Springs; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170391
  • Filename
    6170391
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3547362