Title :
Dielectrophoretic concentrator for enhanced performance of poly-silicon nanowire field effect transistor for biosensing application
Author :
Puttaswamy, Srinivasu Valagerahally ; Su, Yi-Jr ; Sivashankar, Shilpa ; Yang, Shih-Mo ; Yang, Yuh-Shyong ; Liu, Cheng-Hsien
Author_Institution :
Microsyst. & Control Lab., Nat. Tsing-Hua Univ., Hsinchu, Taiwan
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
Biological and medical fields have authenticated stupendous advancement in the development of biosensors and biochips. The development of highly sensitive biological sensors is need of the hour. This research work utilizes the dielectrophoretic concentrator chip with titanium (Ti) electrodes to shape the electric field, to pre-concentrate deoxyribo nucleic acid (DNA) within microfluidic channel onto nanowire region of poly-silicon nanowire field effect transistor (poly-Si NWFET). Preconcentration of biomolecules at the constriction site was demonstrated by focusing the DNA with negative dielectrophoresis (nDEP) manipulation technique. After integrating the DEP device with poly-Si NWFET, the I-VG curve was plotted to ensure n-type behavior.
Keywords :
biosensors; electrophoresis; elemental semiconductors; field effect transistors; lab-on-a-chip; nanowires; silicon; titanium; DNA; biochip; biological sensor; biomolecule; biosensing application; biosensor; deoxyribo nucleic acid; dielectrophoretic concentrator chip; electric field; field effect transistor; microfluidic channel; nDEP manipulation technique; negative dielectrophoresis; poly-Si NWFET; poly-silicon nanowire; titanium electrode; Biosensors; DNA; Dielectrophoresis; Electric fields; Electrodes; FETs; Focusing;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170397