DocumentCode
3547379
Title
Dielectrophoretic concentrator for enhanced performance of poly-silicon nanowire field effect transistor for biosensing application
Author
Puttaswamy, Srinivasu Valagerahally ; Su, Yi-Jr ; Sivashankar, Shilpa ; Yang, Shih-Mo ; Yang, Yuh-Shyong ; Liu, Cheng-Hsien
Author_Institution
Microsyst. & Control Lab., Nat. Tsing-Hua Univ., Hsinchu, Taiwan
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
1305
Lastpage
1308
Abstract
Biological and medical fields have authenticated stupendous advancement in the development of biosensors and biochips. The development of highly sensitive biological sensors is need of the hour. This research work utilizes the dielectrophoretic concentrator chip with titanium (Ti) electrodes to shape the electric field, to pre-concentrate deoxyribo nucleic acid (DNA) within microfluidic channel onto nanowire region of poly-silicon nanowire field effect transistor (poly-Si NWFET). Preconcentration of biomolecules at the constriction site was demonstrated by focusing the DNA with negative dielectrophoresis (nDEP) manipulation technique. After integrating the DEP device with poly-Si NWFET, the I-VG curve was plotted to ensure n-type behavior.
Keywords
biosensors; electrophoresis; elemental semiconductors; field effect transistors; lab-on-a-chip; nanowires; silicon; titanium; DNA; biochip; biological sensor; biomolecule; biosensing application; biosensor; deoxyribo nucleic acid; dielectrophoretic concentrator chip; electric field; field effect transistor; microfluidic channel; nDEP manipulation technique; negative dielectrophoresis; poly-Si NWFET; poly-silicon nanowire; titanium electrode; Biosensors; DNA; Dielectrophoresis; Electric fields; Electrodes; FETs; Focusing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170397
Filename
6170397
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