• DocumentCode
    3547379
  • Title

    Dielectrophoretic concentrator for enhanced performance of poly-silicon nanowire field effect transistor for biosensing application

  • Author

    Puttaswamy, Srinivasu Valagerahally ; Su, Yi-Jr ; Sivashankar, Shilpa ; Yang, Shih-Mo ; Yang, Yuh-Shyong ; Liu, Cheng-Hsien

  • Author_Institution
    Microsyst. & Control Lab., Nat. Tsing-Hua Univ., Hsinchu, Taiwan
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    1305
  • Lastpage
    1308
  • Abstract
    Biological and medical fields have authenticated stupendous advancement in the development of biosensors and biochips. The development of highly sensitive biological sensors is need of the hour. This research work utilizes the dielectrophoretic concentrator chip with titanium (Ti) electrodes to shape the electric field, to pre-concentrate deoxyribo nucleic acid (DNA) within microfluidic channel onto nanowire region of poly-silicon nanowire field effect transistor (poly-Si NWFET). Preconcentration of biomolecules at the constriction site was demonstrated by focusing the DNA with negative dielectrophoresis (nDEP) manipulation technique. After integrating the DEP device with poly-Si NWFET, the I-VG curve was plotted to ensure n-type behavior.
  • Keywords
    biosensors; electrophoresis; elemental semiconductors; field effect transistors; lab-on-a-chip; nanowires; silicon; titanium; DNA; biochip; biological sensor; biomolecule; biosensing application; biosensor; deoxyribo nucleic acid; dielectrophoretic concentrator chip; electric field; field effect transistor; microfluidic channel; nDEP manipulation technique; negative dielectrophoresis; poly-Si NWFET; poly-silicon nanowire; titanium electrode; Biosensors; DNA; Dielectrophoresis; Electric fields; Electrodes; FETs; Focusing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170397
  • Filename
    6170397