DocumentCode :
3547382
Title :
Direct-write single-walled carbon nanotube serpentines using micro chemical vapor deposition
Author :
Zhou, Qin ; Huang, Jiming ; Lin, Liwei
Author_Institution :
Dept. of Mech. Eng., Univ. of California at Berkeley, Berkeley, CA, USA
fYear :
2012
fDate :
Jan. 29 2012-Feb. 2 2012
Firstpage :
1309
Lastpage :
1312
Abstract :
This work presents the capability to grow and deposit single-walled carbon nanotubes (SWNTs) with good position and orientation control toward fully controlled nanomanufacturing. A miniaturized growth platform as the micro chemical vapor deposition system is built by a micromachining process for the synthesis of SWNTs. A collector substrate is placed 50 microns above the growth platform for the depositions of SWNTs. The movements of the collector are continuously controlled by an x-y nanopositioner. Experimentally, depositions of SWNTs in serpentine-shape have been demonstrated. A growth model is proposed and supported by results from various guiding gas flow rates and substrate movements.
Keywords :
carbon nanotubes; chemical vapour deposition; micromachining; nanofabrication; nanopositioning; position control; C; collector substrate; controlled nanomanufacturing; direct-write single-walled carbon nanotube serpentines; growth model; guiding gas flow rates; microchemical vapor deposition; micromachining; miniaturized growth; orientation control; position control; serpentine-shape; x-y nanopositioner; Carbon nanotubes; Chemical vapor deposition; Fluid flow; Force; Nanopositioning; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
ISSN :
1084-6999
Print_ISBN :
978-1-4673-0324-8
Type :
conf
DOI :
10.1109/MEMSYS.2012.6170398
Filename :
6170398
Link To Document :
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