Title :
Piezoelectricity of sub-20-nm nanoimprinted PVDF-TrFE nanograss
Author :
Hong, Chien-Chong ; Huang, Sheng-Uan ; Shieh, Jiann ; Chen, Szu-Hung ; Chen, Alan
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fDate :
Jan. 29 2012-Feb. 2 2012
Abstract :
This paper composed a superior sub-20 nm ferroelectric PVDF-TrFE copolymer nanograss, and provided enhanced piezoelectricity on polymer surfaces. This study demonstrated sub-20 nm PVDF-TrFE nanograss structures that are nanoimprinted using a silicon nanograss mold in a single step. According to the PFM measurements, the maximum piezoelectricity of the single PVDF-TrFE nanopillar was 210.4 pm/V. The piezoelectricity of the developed PVDF-TrFE nanograss structures was 5.19 times larger than that of the PVDF-TrFE flat thin films. The developed technique is simple, economical, and easy to fabricate.
Keywords :
nanostructured materials; piezoelectricity; polymer blends; silicon; PFM measurements; Si; ferroelectric PVDF-TrFE copolymer nanograss; nanograss mold; nanoimprinted PVDF-TrFE nanograss; piezoelectricity; polymer surfaces; thin films; Heating; Nanoscale devices; Nanostructures; Piezoelectricity; Polymers; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170405