Are nonlinear resonators suitable for energy harvesting? — Equivalent circuit analysis of nonlinear response of MEMS resonator

Equivalent circuit analysis for electrostatic nonlinear resonators was conducted for evaluating the efficiency of vibrating energy harvesting devices. Non-linear models for a parallel plate capacitor and doubly clamped beam as well as a non-linear response analysis method on a spice tool have been developed. Measurements from fabricated resonators were in good agreement with output from simulation models. These models were applied for evaluating the efficiency of nonlinear resonators as energy harvesters but no significant improvement compared to linear resonators was obtained.